QUADRA Series(QUADRA 系列)
ATM Robot
QUADRA-QA-34,44
– QUADRA ATM Robot
– 200mm, 300mm Wafer
– Single arm(3 axis), Dual arm(4 axis)
– S-curve motion
– Z-stroke 300mm / 400mm
– Repeatability <0.1mm (3σ)
– End Effector type : Vacuum grip, Edge grip, Passive
– Servo motor, Absolute encoder
VTM Robot
QUADRA-QV400, QV600
– QUADRA VTM Robot
– High vacuum environment
– 200mm, 300mm wafer
– Dual arm (4 axis), Quad arm (6 axis)
– Z-stroke 50mm / 120mm
– Repeatability <0.1mm (3σ)
– Servo motor, Absolute encoder
