ARIES Series
Design Footprint optimally
Utility option:Consists of PM, GAS, CDA, PCW(Process Cooling Water)
ARIES-A400
– Possibility to install maximum 6 PMs
– Transfer 2 wafers to PM at the same time
– Load lock : DUAL STACK TYPE
– Load lock option : Consists of Cooling plate, Pre-Heater
ARIES-A600
– Possibility to install maximum 4PMs
– Load lock : ANGLE Type
– Load lock option : Consists of Cooling plate, VCE(Vacuum Cassette Elevator)
ARIES-Inline
– Possibility to install maximum 4 PMs
– INLINE Type TM – Use of 2 VACUUM ROBOTS
– Load lock : STACK Type
– Load lock option : Consists of Cooling plate, Pre-Heater
ARIES-A600-450(450mm)
– Possibility to install maximum 5 PMs
– Extendable TANDEM-TM structure
– Design Footprint optimally
– Load lock : STACK Type
– Utility option : Consists of PM GAS, CDA, PCW
– 450mm VTM Robot
