DURAPORT Series
Up / Down Mapping
Various Safety Interlock
Wafer ID Reading applied by RFID
DURAPORT-DE-300
– 300mm Wafer FOUP Open / Close device
– Various FOUP
– SWMI S2 and CE
DURAPORT-DMN2-300
– 300mm Wafer FOUP Open / Close & N2 Purge Device
– N2 Purge Function in the FOUP
– 1-In-let Nozzle & 3-In-let Nozzle FOUP
– Minimize N2 Purge time in the FOUP
DURAPORT-DP-450(450mm)
– 450mm Wafer FOUP Open / Close Device
– 450mm FOUP
– Up / Down Mapping Function
– Various Safety Interlock
– Wafer ID Reading applied by RFID
– Easy Maintenance
