PHOENIX Series
Design Footprint optimally
FFU RPM MODE, Pressure MODE
Possibility to install PM-ELEC RACK on the top of EFEM
PHOENIX-P200
– Install 2LPM
– Option : ALIGNER, Light curtain area sensor, Protection BAR
PHOENIX-P300
– Install 3LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR
PHOENIX-P400
– Install 4LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR
PHOENIX-P300-450(450mm)
– 2LPM (Possibility 3LPM)
– Design Footprint optimally
– Option : ALIGNER, Light curtain area sensor, Protection BAR
– FFU RPM Mode, Pressure MODE
– Possibility to install PM-ELEC RACK on the top of EFEM
– 450mm ATM Robot
– 450mm LPM
EFEM Soft
EFEM Software, the Windows-based platform was independently developed in C# and C++ and currently built and operated in EFEM. This supports a TMC field driving facilities and user-friendly GUI (operable only with a TMC without GUI)
A control method is largely categorized into the “Communication Control Type” handling Job and Schedule and the “EFEM Main Control Type” operated by commands from the process equipment. The Communication Control Type reports the EFEM status to FA Host while performing Interface Communication between EFEM Software and Process Module Controller.
